Oregon State University

Electron Microscopy Facility

Services: 
Provide campus-wide access to the electron microscopes for students, researchers and faculty members. Provide training on the operation of the instruments and related knowledge in electron microscopy. Cooperate in scientific research in Materials Science, Life Science and other related fields. Seek partnership with industries.
Department or Field of Research: 
College of Science
Location: 
Cordley Hall 1071-1078
Consultant: 
Dr. Yi Liu
Instruments: 
Philips CM12 Scanning Transmission Electron Microscope (STEM) Capability: -Accelerating voltage: 0-120kV with 20kV step -Point Resolution: 0.34nm -Line Resolution: 0.2nm -Single-tilt & double-tilt sample holders -Images with diffraction contrast and mass thickness contrast -Series tilting for electron diffraction patterns (maximum tilt angle: ±60) -Micro Micro-Diffraction -Convergent-Beam Electron Diffraction (CBED) -X-Ray Chemical analysis – Energy Dispersive Spectrometry (EDS) Applications: Crystal defect analysis Crystal structure analysis Local chemical composition analysis Microstructure in materials and biological samples --- FEI Quanta 3D Dual Beam FIB Scanning Electron Microscope Capability Field emission gun (Schottky emitter) Accelerating voltage: 200 V – 30 kV Omniprobe attached Probe current: up to 200nA continuously adjustable X-Ray Energy Dispersive Spectrometry (spectrum and elemental mapping) Solid-state and gaseous backscattered electron detectors Scanning transmission electron detector (STEM) Up to 5 gas injectors for enhanced etch or deposition (currently with carbon and Pt deposition) Variable pressure (high vacuum, low vacuum, ESEM modes, 0.1–20 Torr, up to 30 Torr) Electron beam Resolution High-vacuum: 0.8 nm at 30kV (STEM) 1.2 nm at 30kV (SE) 2.5 nm at 30kV (BSE) 2.9 nm at 1kV (SE) Low-vacuum: 1.5 nm at 30kV (SE) 2.5 nm at 30kV (BSE) 2.9 nm at 3kV (SE) Extended low-vacuum (ESEM): 1.5 nm at 30kV (SE) Ion beam Resolution 7 nm at 30kV Applications Surface morphology of materials Z-contrast imaging (elemental contrast) Electron Channeling contrast (crystal orientation contrast) Variable pressure for biological and other non-conductive samples Experiments under water vapor and other possible gases Nano-fabrications (nano-device, nanopatterns) 3D reconstruction TEM sample preparation (Cross-section & lift-out technique) ____ FEI Quanta 600 FEG Scanning Electron Microscope Capability Field emission gun (Schottky emitter) Accelerating voltage: 200 V – 30 kV Probe current: up to 100nA continuously adjustable X-Ray Energy Dispersive Spectrometry (spectrum and elemental mapping) Solid-State and Gaseous backscattered electron detectors Scanning transmission electron detector (STEM) Variable pressure (high vacuum, low vacuum, ESEM modes, 0.1–20 Torr, up to 30 Torr) Peltier cooled specimen stage produces moisture on sample (-25C – 55C) Heating stage to heat the sample up to 1000C in chamber Electron beam Resolution High-vacuum: 0.8 nm at 30kV (STEM) 1.2 nm at 30kV (SE) 2.5 nm at 30kV (BSE) 3.0 nm at 1kV (SE) Low-vacuum: 1.5 nm at 30kV (SE) 2.5 nm at 30kV (BSE) 3.0 nm at 3kV (SE) Extended low-vacuum (ESEM): 1.5 nm at 30kV (SE) Applications Surface morphology of materials Z-contrast imaging (elemental contrast) Electron Channeling contrast (crystal orientation contrast) Variable pressure for biological and other non-conductive samples Experiments under water vapor or moisture In-situ heating experiment___• Optical Microscope (Leica DM5000B) Capability Life science applications___• Sample preparations Vacuum evaporation (VE-10, cabon coating, heavy metal sputtering) Sputter coater (108 Auto, gold and Pd coating) -Two ultra-microtomes (MT-2) -Critical point dryer (Electron Microscopy Sciences) -Glow discharge facility (self made) -Low speed diamond saw (Buehler Isomet) -Ion-beam milling (Gatan 600 Duomill) -Twin-jet eletro-polisher (Struers Tenupol-3) -Grinder polisher (Applied HighTech TwinPrep 3)
Phone: 
541-737-5645 (Office), 541-737-5245 (TEM), 541-737-5247 (SEM)

Contact Info

Research Office
Oregon State University
A312 Kerr Administration
Corvallis, OR
97331-2140
Phone 541-737-3467
Fax 541-737-9041
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